RFMagnetronsputtering相关论文
用射频磁控溅射法在Pt/Ti/SiO2/Si(100)基片上沉积了LiTaO3薄膜, 并在氧气气氛中不同温度下进行退火。采用SEM、XRD、XPS等表征方......
采用射频磁控溅射法,在K9 抛光玻璃基底上沉积氧化钒(VOx)薄膜,研究在其他参数保持不变时氧分压参量对薄膜的结构、表面质量及透光性能......
在不同氨分压比(0~30%)下,用射频磁控溅射法在玻璃和硅衬底上制备了N掺杂β-Ga2O3薄膜.研究了氨分压比和退火对薄膜光学和结构特性......
The surface morphologies of (Pb, Sr) TiO3 thin film fabricated on Si-buffered Pt/Ti/SiO2/Si substrat
(Pb, Sr)TiO3 (PST) thin film are fabricated by RF magnetron sputtering on Si-buffered Pt/Ti/SiO2/Si substrates with diff......